
Products · Materials Science
High-purity precursors and the process chemicals a fabrication line consumes. The specification here is written almost entirely in what must be absent: metals at parts per billion or lower, particles counted per millilitre above a stated size, and a container that does not leach into its own contents.
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Specifying it
The compound is usually fixed by the route. These are the things that vary between suppliers and between lots.
A semiconductor-grade chemical is defined by its metallic impurity profile, not its assay. Sodium, potassium, iron, copper and the rest are limited individually at parts per billion or below, and the certificate should report them by ICP-MS rather than summarising them as a single figure. An AR grade with an excellent assay can be several orders of magnitude away on metals.
SEMI C standards define successive purity tiers, and a process qualified on one tier is not automatically safe on another. Moving down a tier to save cost changes the metal budget of the whole process. State the SEMI grade the process requires rather than a general purity description.
A chemical can be metallically clean and still carry particles that cause defects on a wafer. Particle counts are specified per millilitre above a stated size — 0.2 µm and 0.5 µm are common thresholds — and reported by liquid particle counter. If defect density matters, this belongs on the enquiry independently of the metals specification.
Glass leaches sodium and boron; ordinary plastics leach plasticisers and extractables. High-purity chemicals ship in specific fluoropolymer or specially prepared HDPE for this reason, and decanting into an unqualified vessel discards the specification you paid for. Packaging and any dispensing arrangement should be agreed at enquiry.
Questions